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Nanometer Scale Time of Flight Back Scattering Spectrometry in the Helium Ion Microscope

  • Nico Klingner (a1), Gregor Hlawacek (a1), Rene Heller (a1), Johannes von Borany (a1) and Stefan Facsko (a1)...
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[1] Hlawacek, G., et al, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 32 (2014). p. 020801.
[2] Ramachandra, R., Griffin, B. J. & Joy, D. C. Ultramicroscopy 109 (2009). p. 748.
[3] Veligura, V., et al, Journal of Luminescence 157 (2015). p. 321.
[4] Wirtz, T., et al, Nanotechnology 26 (2015). p. 434001.
[5] Klingner, N., et al, Ultramicroscopy accepted (2015).

Nanometer Scale Time of Flight Back Scattering Spectrometry in the Helium Ion Microscope

  • Nico Klingner (a1), Gregor Hlawacek (a1), Rene Heller (a1), Johannes von Borany (a1) and Stefan Facsko (a1)...

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