Hostname: page-component-848d4c4894-r5zm4 Total loading time: 0 Render date: 2024-06-29T17:15:14.018Z Has data issue: false hasContentIssue false
  • English
  • Français

Multiphysics Simulation for TEM Objective Lens Evaluation & Design

Published online by Cambridge University Press:  22 July 2022

Patrick McBean ,
Zachary Milne ,
Arjun Kanthawar ,
Khalid Hattar ,
Katherine Jungjohann  and
Lewys Jones
Patrick McBean
Affiliation:
School of Physics, Trinity College Dublin, Dublin, Ireland Advanced Microscopy Laboratory, Centre for Research on Adaptive Nanostructures & Nanodevices (CRANN), Dublin, Ireland
Zachary Milne
Affiliation:
Center for Integrated Nanotechnologies, Sandia National Laboratories. Albuquerque, NM, United States
Arjun Kanthawar
Affiliation:
Center for Integrated Nanotechnologies, Sandia National Laboratories. Albuquerque, NM, United States
Khalid Hattar
Affiliation:
Center for Integrated Nanotechnologies, Sandia National Laboratories. Albuquerque, NM, United States
Katherine Jungjohann
Affiliation:
Center for Integrated Nanotechnologies, Sandia National Laboratories. Albuquerque, NM, United States
Lewys Jones*
Affiliation:
School of Physics, Trinity College Dublin, Dublin, Ireland Advanced Microscopy Laboratory, Centre for Research on Adaptive Nanostructures & Nanodevices (CRANN), Dublin, Ireland
*
*Corresponding author: lewys.jones@tcd.ie

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advanced Imaging and Spectroscopy for Nanoscale Materials
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2494 - 2495
Check for updates
Copyright
Copyright © Microscopy Society of America 2022

References

Tsuno, K. and Jefferson, D. A., “Design of an objective lens pole piece for a transmission electron microscope with a resolution less than 0.1 nm at 200 kV,” Ultramicroscopy, vol. 72, no. 1–2, pp. 31–39, Apr. 1998, doi: 10.1016/S0304-3991(97)00125-3.CrossRefGoogle Scholar
Ikuhara, Y., “Towards New Transmission Electron Microscopy in Advanced Ceramics,” J. Ceram. Soc. Japan, vol. 110, no. 1279, pp. 139–145, Mar. 2002, doi: 10.2109/JCERSJ.110.139.CrossRefGoogle Scholar
Zlámal, J. and Lencová, B., “Development of the program EOD for design in electron and ion microscopy,” Nucl. Instruments Methods Phys. Res. Sect. A Accel. Spectrometers, Detect. Assoc. Equip., vol. 645, no. 1, pp. 278–282, Jul. 2011, doi: 10.1016/J.NIMA.2010.12.198.CrossRefGoogle Scholar
Dahl, D. A., Delmore, J. E., and Appelhans, A. D., “SIMION PC/PS2 electrostatic lens design program,” Rev. Sci. Instrum., vol. 61, no. 1, p. 607, Sep. 1998, doi: 10.1063/1.1141932.Google Scholar
Gyimesi, M., Zhulin, V., and Ostergaard, D., “Particle trajectory tracing in ANSYS,” Nucl. Instruments Methods Phys. Res. Sect. A Accel. Spectrometers, Detect. Assoc. Equip., vol. 427, no. 1–2, pp. 408–411, May 1999, doi: 10.1016/S0168-9002(98)01528-9.CrossRefGoogle Scholar
Munro, E., Rouse, J., Liu, H., Wang, L., and Zhu, X., “Simulation software for designing electron and ion beam equipment,” Microelectron. Eng., vol. 83, no. 4-9 SPEC. ISS., pp. 994–1002, Apr. 2006, doi: 10.1016/J.MEE.2006.01.076.CrossRefGoogle Scholar
McBean, P., O'Mahony, D., and Jones, L., “Development of a User Adjustable Pole-piece Gap Objective-lens,” in European Microscopy Congress Proceedings, Mar. 2020, p. 322, doi: 10.22443/RMS.EMC2020.322.Google Scholar
Hattar, K. and Jungjohann, K. L., “Possibility of an integrated transmission electron microscope: enabling complex in-situ experiments,” J. Mater. Sci., vol. 56, no. 9, pp. 5309–5320, Mar. 2021, doi: 10.1007/s10853-020-05598-z.CrossRefGoogle Scholar
This work is supported at Trinity College Dublin by Science Foundation Ireland. LJ would like to acknowledge SFI/Royal Society grant number URF/RI/191637. PMB would like to acknowledge the AMBER Centre under grant number 17/RC-PhD/3477. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International, Inc., for the U.S. DOE's National Nuclear Security Administration under contract DE-NA-0003525. The views expressed in the article do not necessarily represent the views of the U.S. DOE or the United States Government.Google Scholar