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Modeling Decontamination by Downstream Plasma Cleaning using Both Quartz, Crystal Microbalance and UV-Visible Spectroscopic Data

Published online by Cambridge University Press:  26 July 2009

CG Morgan
Affiliation:
XEI Scientific,Inc
R Vane
Affiliation:
XEI Scientific,Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2009