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Microstructural Characterization of Ion Implantation Effects in Aluminum Nitride Substrates for Energy-Scavenging Applications

Published online by Cambridge University Press:  09 October 2013

F.S. Alleyne  and
R. Gronsky
F.S. Alleyne
Affiliation:
R. Gronsky
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1874 - 1875
Copyright
Copyright © Microscopy Society of America 2013