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Microstructural analysis of RF-sputtered Ge-Bi-Te ternary chalcogenide alloy for phase change memory application

Published online by Cambridge University Press:  05 August 2007

C Sun ,
J Lee ,
M Youm  and
Y Kim
C Sun
Affiliation:
Korea Advanced Institute of Science and Technology
J Lee
Affiliation:
Korea Advanced Institute of Science and Technology
M Youm
Affiliation:
Korea Institute of Science and Technology
Y Kim
Affiliation:
Korea Institute of Science and Technology
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 1084 - 1085
Copyright
© 2007 Microscopy Society of America

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