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Microscopy of Interconnects for 90nm Technology

Published online by Cambridge University Press:  22 July 2003

B. Mine ,
M. Kuhn ,
M. McKeag ,
J. Brandt ,
T. Brookshier ,
B. Davies  and
K. Headley
B. Mine
Affiliation:
Intel Corporation 2501 229th St Hillsboro, OR 9712
M. Kuhn
Affiliation:
Intel Corporation 2501 229th St Hillsboro, OR 9712
M. McKeag
Affiliation:
Intel Corporation 2501 229th St Hillsboro, OR 9712
J. Brandt
Affiliation:
Intel Corporation 2501 229th St Hillsboro, OR 9712
T. Brookshier
Affiliation:
Intel Corporation 2501 229th St Hillsboro, OR 9712
B. Davies
Affiliation:
Intel Corporation 2501 229th St Hillsboro, OR 9712
K. Headley
Affiliation:
Intel Corporation 2501 229th St Hillsboro, OR 9712

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 462 - 463
Copyright
Copyright © Microscopy Society of America 2003