Hostname: page-component-76fb5796d-45l2p Total loading time: 0 Render date: 2024-04-27T00:42:10.408Z Has data issue: false hasContentIssue false

Microscopic Studies of Dual Phase Amorphous/Microcrystalline Silicon Prepared by the Saddle-Field Glow Discharge Deposition Method with Hydrogen Dilution

Published online by Cambridge University Press:  01 August 2004

Tatiana Allen
Affiliation:
University of Tennessee Chattanooga
Davit Yeghikyan
Affiliation:
University of Toronto, Canada
Keith Leong
Affiliation:
University of Toronto, Canada
Nazir Kherani
Affiliation:
University of Toronto, Canada
William Roes
Affiliation:
Tennessee Valley Authority, Chattanooga, Tennessee
Stefan Zukotynski
Affiliation:
University of Toronto, Canada
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)