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MEMS-based Heating Element forin-situDynamical Experiments on FIB/SEM Systems

Published online by Cambridge University Press:  25 July 2016

Libor Novák ,
Jaroslav Stárek ,
Tomáš Vystavěl  and
Luigi Mele
Libor Novák
Affiliation:
FEI Company, Vlastimila Pecha 12, 627 00 Brno, Czech Republic
Jaroslav Stárek
Affiliation:
FEI Company, Vlastimila Pecha 12, 627 00 Brno, Czech Republic
Tomáš Vystavěl
Affiliation:
FEI Company, Vlastimila Pecha 12, 627 00 Brno, Czech Republic
Luigi Mele
Affiliation:
FEI Company, Achtseweg Noord 5, 5600 KA Eindhoven, The Netherlands

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 184 - 185
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Mele, L., et al., A MEMS-based heating holder for the direct imaging of simultaneous in-situ heating and biasing experiments in scanning/transmission electron microscopes, Microscopy Research and Technique, Published online 28-Jan 2016, DOI: 10.1002/jemt.22623.CrossRefGoogle Scholar
[2] Mele, L., et al., A molybdenum MEMS microhotplate for high-temperature operation, Sensors & Actuators: A. Physical, 2012 | 188 | 173-180.CrossRefGoogle Scholar
[3] Novak, L., et al., MEMS element for in-situ heating experiments on FIB/SEM systems, FEBIP 2014 Abstract Book (p. 199–200.Google Scholar
[4] The authors acknowledge funding from the Technology Agency of the Czech Republic: project TE01020118 and A. Patak and F. Mika from Institute of Scientific Instruments of the CAS for assistance with part of experiments.Google Scholar