Hostname: page-component-5c6d5d7d68-xq9c7 Total loading time: 0 Render date: 2024-08-16T01:04:02.733Z Has data issue: false hasContentIssue false
  • English
  • Français

Low Voltage Scanning Electron Microscopy (LVSEM) in Perspective

Published online by Cambridge University Press:  02 July 2020

E.D. Boyes
E.D. Boyes*
Affiliation:
DuPont Company, CR&D, PO Box 80356-383, Wilmington, DE19880-0356
Get access

Extract

In the past quarter century low voltage SEM (LVSEM) has been developed for use in a wide range of applications, and it has become the main area of innovation in SEM, and now perhaps more widely in electron microscopy. The intellectual challenge (1,2) has been transformed into a vital tool of modern technology in the semiconductor, polymer and chemical industries, and is widely used in the materials and biological sciences (3, 4). It has been claimed by this author and others that LVSEM is the rational and preferred state of SEM, but unfortunately at the time of the first SEMs only higher voltage systems could be built with the technologies available half a century ago (1). The primary advantage of the SEM remains the use of real bulk specimens with a minimum of potentially invasive preparation. A wide area in the range of square mms to sq inches can contain aperiodic, or otherwise infrequent, events in or on the surface, or in a simple snapped cross-section, and always using relatively stable bulk samples.

Type
A. Howie Symposium: Celebration of Pioneering Electron Microscopy
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 674 - 675
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. As reviewed by Oatley, CW, Scanning Electron Microscopy, CUP, (1972)Google Scholar

2. Crewe, A V, Ultramicroscopy, 1 (1976) 267CrossRefGoogle Scholar

3. Boyes, E D, Proc ICEM, 12 (1994) 51Google Scholar

4. Boyes, E D, Adv Matls, 10 (1998) 12773.0.CO;2-D>CrossRefGoogle Scholar

5. Cazaux, J, J Appl Phys, 85 (1998) 1Google Scholar

6. Dawson, P H, J Appl Phys, 37 (1966) 3644CrossRefGoogle Scholar

7. Howie, A, J of Micros, 180 (1995) 192CrossRefGoogle Scholar

8. Crewe, A Vet al., J Appl Phys, 39 (1968) 576CrossRefGoogle Scholar

9. Boyes, E Det al., Proc EMSA, 38 (1980) 226Google Scholar

10. Boyes, E D, Proc MSA, 55 (1997) 1219Google Scholar

11. Boyes, E D, Proc ICEM 10 (1986) 383Google Scholar