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Investigation of the Structure of Plasma Erosion Craters using a SEM/FIB Dual Beam Workstation

Published online by Cambridge University Press:  07 September 2007

F Soldera
Affiliation:
Universität des Saarlandes,Germany
N Jeanvoine
Affiliation:
Universität des Saarlandes,Germany
K Trinh
Affiliation:
Universität des Saarlandes,Germany
F Mücklich
Affiliation:
Universität des Saarlandes,Germany
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2007

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