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Investigation of Ar Ion-Milling Rates for Transmission Electron Microscopy Specimens

Published online by Cambridge University Press:  23 September 2015

Min-Hee Lee
Affiliation:
Advanced Process and Materials R&BD Group, Incheon Regional Division, Korea Institute of Industrial Technology, Incheon 406-840, Republic of Korea
Kyou-Hyun Kim
Affiliation:
Advanced Process and Materials R&BD Group, Incheon Regional Division, Korea Institute of Industrial Technology, Incheon 406-840, Republic of Korea

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Mayer, J., et al, MRS Bulletin 32 (2007) 400407.Google Scholar
[2] Doyle, P. A. & Turner, P. S., Acta Crystallogr. Sect A24 (1968) 390397.Google Scholar
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[4] This work was supported by the research fund from Korea Institute of Industrial Technology (KITECH)..Google Scholar