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Influence of FIB-Preparation on the Potential Structure of Complementarily Doped Semiconductors Investigated by Electron-Holographic Methods

Published online by Cambridge University Press:  07 September 2007

A Lenk ,
D Wolf  and
U Mühle
A Lenk
Affiliation:
Dresden University,Germany
D Wolf
Affiliation:
Dresden University,Germany
U Mühle
Affiliation:
Qimonda Dresden GmbH Germany
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 306 - 307
Copyright
Copyright © Microscopy Society of America 2007

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