Hostname: page-component-76fb5796d-skm99 Total loading time: 0 Render date: 2024-04-26T10:45:21.265Z Has data issue: false hasContentIssue false
  • English
  • Français

In situ chip-based heating studies of metal-induced layer exchange and Si crystallization using STEM, LEND and SE imaging in SEM

Published online by Cambridge University Press:  30 July 2021

Peter Denninger ,
Peter Schweizer ,
Tim Schwope ,
Christian Dolle  and
Erdmann Spiecker
Peter Denninger
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Interdisciplinary Center for Nanostructured Films (IZNF), Department of Materials Science and Engineering, Friedrich-Alexander University Erlangen-Nürnberg (FAU), Erlangen, Germany, Erlangen, Bayern, Germany
Peter Schweizer
Affiliation:
Empa, Thun, Switzerland
Tim Schwope
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Interdisciplinary Center for Nanostructured Films (IZNF), Department of Materials Science and Engineering, Friedrich-Alexander University Erlangen-Nürnberg (FAU), Erlangen, Germany, Erlangen, Bayern, Germany
Christian Dolle
Affiliation:
Karlsruher Institut für Technologie, Karlsruhe, Baden-Wurttemberg, Germany
Erdmann Spiecker
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Interdisciplinary Center for Nanostructured Films (IZNF), Department of Materials Science and Engineering, Friedrich-Alexander University Erlangen-Nürnberg (FAU), Erlangen, Germany, Erlangen, Bayern, Germany

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Investigating Phase Transitions in Functional Materials and Devices by In Situ/Operando TEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2696 - 2698
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Schweizer, P., Denninger, P., Dolle, C., Spiecker, E., Low energy nano diffraction (LEND) – A versatile diffraction technique in SEM, Ultramicroscopy 213 (2020) 112956CrossRefGoogle ScholarPubMed
Wang, Z., Jeurgens, L.P.H., Mittemeijer, E.J. (Eds.), Metal-induced crystallization: Fundamentals and applications, Pan Stanford Publishing, [Singapore], 2015CrossRefGoogle Scholar
The authors acknowledge funding by the German Research Foundation (DFG) via the Research Training Group GRK 1896 “In situ microscopy with electrons, X-rays and Scanning probes”Google Scholar