Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-12-03T00:59:29.560Z Has data issue: false hasContentIssue false

High-Accuracy Sample Preparation for Three Dimensional Atom Probe Tomography Using Orthogonal Column Layout FIB-SEM and its STEM function

Published online by Cambridge University Press:  01 August 2018

Miki Tsuchiya
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Yoshihisa Orai
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Takahiro Sato
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Xin Man
Affiliation:
Hitachi High-Tech Science corp., Beam Technology Systems Design Group 1, Oyama-cho, Japan
Junichi Katane
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Tsuyoshi Onishi
Affiliation:
Hitachi High-Technologies corp., Science System Sales & Marketing Div., Tokyo, Japan

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Miller, M. K, etal, Microsc.Microanal 13 2007) p. 428.Google Scholar
[2] Man, X., etal, Mcros.Microanal 20(Suppl 3 2014) p. 354.Google Scholar
[3] Tsuchiya, M, et al, Proceedings of the 73rd Annual meeting of JSM2017 52 2017) p. 88.Google Scholar