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High-Accuracy Sample Preparation for Three Dimensional Atom Probe Tomography Using Orthogonal Column Layout FIB-SEM and its STEM function

  • Miki Tsuchiya (a1), Yoshihisa Orai (a1), Takahiro Sato (a1), Xin Man (a2), Junichi Katane (a1) and Tsuyoshi Onishi (a3)...
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[1] Miller, M. K, etal, Microsc.Microanal 13 2007) p. 428.
[2] Man, X., etal, Mcros.Microanal 20(Suppl 3 2014) p. 354.
[3] Tsuchiya, M, et al, Proceedings of the 73rd Annual meeting of JSM2017 52 2017) p. 88.

High-Accuracy Sample Preparation for Three Dimensional Atom Probe Tomography Using Orthogonal Column Layout FIB-SEM and its STEM function

  • Miki Tsuchiya (a1), Yoshihisa Orai (a1), Takahiro Sato (a1), Xin Man (a2), Junichi Katane (a1) and Tsuyoshi Onishi (a3)...

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