Hostname: page-component-76fb5796d-25wd4 Total loading time: 0 Render date: 2024-04-26T08:06:37.135Z Has data issue: false hasContentIssue false

High Resolution TEM Imaging with Hollow-Cone Illumination

Published online by Cambridge University Press:  02 July 2020

Maxim V. Sidorov
Affiliation:
Arizona State University, Center for Solid State Science, Tempe, AZ, 85287-1704
Martha R. McCartney
Affiliation:
Arizona State University, Center for Solid State Science, Tempe, AZ, 85287-1704
David J. Smith
Affiliation:
also at, Arizona State University, Department of Physics and Astronomy, Tempe, AZ, 85287-1504
Get access

Extract

It has long been realized that imaging with hollow cone illumination (HCI) should, in theory, improve the directly interpretable resolution of TEM by as much as 100% (albeit at the expense of contrast). The principle of HCI was first proposed by Scherzer in 1949 and then reinvented by Hanssen and Trepte in 1971. As opposed to axial illumination, HCI effectively eliminates zeroes and reversals of the transfer function providing direct interpretability of the resulting images. In addition to the substantial resolution enhancement, HCI should reduce significantly the phase-contrast noise inherent in axial HRTEM images. However, there are experimental obstacles for high resolution HCI which make its practical application very difficult to implement. To our knowledge, all observations using HCI so far have not shown all of the expected improvement predicted theoretically. This is believed to be due to the fact that accurate coma-free alignment is required to substantially improve the resolution.

Type
The Limits of Image Resolution: Seeing is Believing
Copyright
Copyright © Microscopy Society of America 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Scherzer, O., J. Appl. Phys. 20 (1949) 2010.1063/1.1698233CrossRefGoogle Scholar
2.Hanssen, K.-J., Trepte, L., Optik 33 (1971) 166Google Scholar
3.Saxton, W.O., Smith, D.J., Inst. Phys. Conf. Ser. No. 52 (1980) 256Google Scholar
4.Dinges, C., Kohl, H., Rose, H., Ultramicroscopy 55 (1994) 9110.1016/0304-3991(94)90083-3CrossRefGoogle Scholar
5.Kunath, W., Zemlin, F., Weiss, K., Ultramicroscopy 16 (1985) 12310.1016/0304-3991(85)90068-3CrossRefGoogle Scholar
6.Geipel, T., Mader, W., Ultamicroscopy 63 (1996) 6510.1016/0304-3991(96)00030-7CrossRefGoogle Scholar
7. The electron microscopy was conducted at the Center for High Resolution Electron Microscopy at ASU. Partial support from ARPA grant N00014-95-1-0918 is also acknowledged (M.V.S.)Google Scholar