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Harnessing Local Sample Variations to Generate Self-Consistent EELS References for Stoichiometry Quantification

Published online by Cambridge University Press:  05 August 2019

Berit H. Goodge ,
Hari P. Nair ,
Jacob P. Ruf ,
Nathaniel J. Schreiber ,
Kyle M. Shen ,
Darrell G. Schlom  and
Lena F. Kourkoutis
Berit H. Goodge
Affiliation:
1School of Applied and Engineering Physics, Cornell University, Ithaca, NY, USA Kavli Institute at Cornell for Nanoscale Science, Cornell University, Ithaca, NY, USA
Hari P. Nair
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY, USA
Jacob P. Ruf
Affiliation:
Department of Physics, Cornell University, Ithaca, NY, USA
Nathaniel J. Schreiber
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY, USA
Kyle M. Shen
Affiliation:
Kavli Institute at Cornell for Nanoscale Science, Cornell University, Ithaca, NY, USA Department of Physics, Cornell University, Ithaca, NY, USA
Darrell G. Schlom
Affiliation:
Kavli Institute at Cornell for Nanoscale Science, Cornell University, Ithaca, NY, USA Department of Materials Science and Engineering, Cornell University, Ithaca, NY, USA
Lena F. Kourkoutis*
Affiliation:
1School of Applied and Engineering Physics, Cornell University, Ithaca, NY, USA Kavli Institute at Cornell for Nanoscale Science, Cornell University, Ithaca, NY, USA
*
*Corresponding author: lena.f.kourkoutis@cornell.edu

Abstract

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Type
Current Trends and Challenges in Electron Energy-Loss Spectroscopy
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 580 - 581
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Gloter, , et al. Mater. Sci. in Semicond. Process. 65:101016 (2017).Google Scholar
[2]Hart, , et al. Sci. Rep. 7 (2017), p. 8243.Google Scholar
[3]Goodge, Baek, Kourkoutis., Microscopy & Microanalysis 24 S1 (2018), p. 1844.Google Scholar
[4]Nair, , et al. APL Materials 6:101108 (2018).Google Scholar
[5]Support: NSF (DMR-1539918, DMR-1429155, DMR-1719875) and AFOSR (FA 9550-16-1-0305).Google Scholar