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Getting your Scanning Electron Microscope to Perform at Atomic Resolution Levels

Published online by Cambridge University Press:  30 July 2021

Andras Vladar  and
Kerim Arat
Andras Vladar
Affiliation:
Natl. Inst. of Standards and Technology, Gaithersburg, Maryland, United States
Kerim Arat
Affiliation:
Natl. Inst. of Standards and Technology, Gaithersburg, Maryland, United States

Abstract

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Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1328 - 1329
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

10 nm Three-dimensional CD-SEM Metrology, Vladár, A. E. et al. , https://doi.org/10.1117/12.2045977CrossRefGoogle Scholar
Quantitative Comparison of simulated and measured signals in the STEM mode of a SEM, Walker, C.G.H. et al. https://doi.org/10.1016/j.nimb.2017.10.034Google Scholar
Scattering intensity distribution dependence on collection angles in annular dark-field STEM-in-SEM images, Holm, J. https://doi.org/10.1016/j.ultramic.2018.06.007CrossRefGoogle Scholar
Electron Irradiation Cleaning of the SEM and its Samples, Vladár, A.E., et al. M&M 2021Google Scholar