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Ga+ and Xe+ FIB Milling and Measurement of FIB Damage in Aluminum

Published online by Cambridge University Press:  04 August 2017

Brandon Van Leer
Affiliation:
FEI Company, Hillsboro, OR, USA.
Arda Genc
Affiliation:
FEI Company, Hillsboro, OR, USA.
Rick Passey
Affiliation:
FEI Company, Hillsboro, OR, USA.

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Giannuzzi, L.A., et al, Mater. Res. Soc. Symp. Proc. 480 1997). pp. 19.CrossRefGoogle Scholar
[2] Presley, M. in "The Formation of Amorphous and Crystalline Damage in Metallic and Semiconducting Materials under Gallium Ion Irradiation", Ohio State University Doctoral Dissertation, (2016) p 80.Google Scholar
[3] Ziegler, JF & Biersack, JP SRIM 2003, www.SRIM.com.Google Scholar