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The FIB/SEM Technique, Atomic Force Microscopy and Acoustic Microscopy for Detection of Subsurface Defects in Thin DLC Coatings

Published online by Cambridge University Press:  01 August 2005

P V Zinin ,
M H Manghnani ,
S Berezina ,
B Koehler ,
K Bernland ,
D Fei  and
D A Rebinsky
P V Zinin
Affiliation:
University of Hawaii
M H Manghnani
Affiliation:
University of Hawaii
S Berezina
Affiliation:
University of Hawaii
B Koehler
Affiliation:
Fraunhofer, Germany
K Bernland
Affiliation:
Fraunhofer, Germany
D Fei
Affiliation:
Caterpillar Inc., Peoria, Illinois
D A Rebinsky
Affiliation:
Caterpillar Inc., Peoria, Illinois

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 668 - 669
Copyright
© 2005 Microscopy Society of America