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Femtosecond Laser Damage in Metals and Semiconductors During TriBeam Tomography

Published online by Cambridge University Press:  25 July 2016

M.P. Echlin ,
M. Titus ,
W.C. Lenthe ,
M. Straw ,
P. Gumbsch  and
T.M. Pollock
M.P. Echlin
Affiliation:
Materials Department, University California at Santa Barbara, Santa Barbara, USA
M. Titus
Affiliation:
Materials Department, University California at Santa Barbara, Santa Barbara, USA
W.C. Lenthe
Affiliation:
Materials Department, University California at Santa Barbara, Santa Barbara, USA
M. Straw
Affiliation:
FEI Company, Hillsboro, OR, USA
P. Gumbsch
Affiliation:
Fraunhofer IWM, Freiburg, Germany Institute of Applied Materials (IAM), Karlsruhe Institute of Technology, Germany
T.M. Pollock
Affiliation:
Materials Department, University California at Santa Barbara, Santa Barbara, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 148 - 149
Copyright
© Microscopy Society of America 2016 

References

References:

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[4] Echlin, M.P., et al, Microscopy and Microanalysis 11 (2013). p.Google Scholar
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