Hostname: page-component-84b7d79bbc-dwq4g Total loading time: 0 Render date: 2024-07-30T07:40:16.314Z Has data issue: false hasContentIssue false
  • English
  • Français

Fast 3D Tomography of C4 Solder Bump by Using Xe Plasma Focused Ion Beam

Published online by Cambridge University Press:  09 October 2013

T. Hrncir ,
L. Hladik ,
J. Jiruse  and
F. Lopour
T. Hrncir
Affiliation:
L. Hladik
Affiliation:
J. Jiruse
Affiliation:
F. Lopour
Affiliation:

Abstract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 860 - 861
Copyright
Copyright © Microscopy Society of America 2013