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Extracting Thickness and Tilt From 4D-STEM Datasets to Model the Influence on ABF Images

  • Abinash Kumar (a1), Celesta S. Chang (a2), Everett D. Grimley (a1), Zhen Chen (a3) and James M. LeBeau (a1)...
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Abstract

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References

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[1] May, S. J., et al, Physical Review B 82 2010) p. 014110.
[2] LeBeau, J. M., et al, Ultramicroscopy 110 2010) p. 118.
[3] Hwang, J., et al, Applied Physics Letters 100 2012) p. 191909.
[4] Tate, M. W., et al, Microscopy and Microanalysis 22 2016) p. 237.
[5] We would like to thank D. A. Muller for supplying the EMPAD data acquired from a thin film grown by H. Nair and D. G. Schlom. This material is based upon work supported by the National Science Foundation, as part of the Center for Dielectrics and Piezoelectrics under Grant Nos. IIP-1361571 and IIP-1361503.

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