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Exploring the 3D Resolution of Parallax Phase Reconstruction from 4D STEM: A Dopant Depth Case Study

Published online by Cambridge University Press:  22 July 2022

E.W.C. Terzoudis-Lumsden ,
T.C. Petersen ,
H.G. Brown ,
P.M. Pelz ,
C. Ophus  and
S.D. Findlay
E.W.C. Terzoudis-Lumsden*
Affiliation:
School of Physics and Astronomy, Monash University, Melbourne, VIC, Australia
T.C. Petersen
Affiliation:
Monash Centre for Electron Microscopy, Monash University, Melbourne, VIC, Australia
H.G. Brown
Affiliation:
Ian Holmes Imaging Center, Bio21 Molecular Science and Biotechnology Institute, University of Melbourne, Melbourne, VIC, Australia
P.M. Pelz
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA Department of Materials Science and Engineering, University of California, Berkeley, CA, USA
C. Ophus
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
S.D. Findlay
Affiliation:
School of Physics and Astronomy, Monash University, Melbourne, VIC, Australia
*
*Corresponding author: Emmanuel.Terzoudis-Lumsden1@monash.edu

Abstract

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Type
Developments of 4D-STEM Imaging - Enabling New Materials Applications
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 404 - 405
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Copyright
Copyright © Microscopy Society of America 2022

References

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This research was supported under the Australian Research Council's Discovery Projects funding scheme (Project FT190100619). E.W.C.T-L acknowledges support through an Australian Government Research Training Program Scholarship.Google Scholar