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Evaluation of Neon Focused Ion Beam Milling for TEM Sample Preparation

Published online by Cambridge University Press:  25 July 2016

T. C. Pekin ,
F. I. Allen  and
A. M. Minor
T. C. Pekin
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA, and the National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
F. I. Allen
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA, and the National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA
A. M. Minor
Affiliation:
Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA, and the National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 146 - 147
Copyright
© Microscopy Society of America 2016 

References

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[9] The authors acknowledge support from the National Science Foundation CMMI/MoM program under GOALI Grant 1235610. Portions of this work were performed as a user project at the Molecular Foundry at Lawrence Berkeley National Laboratory, which is supported by the U.S. Department of Energy under Contract # DE-AC02-05CH11231. The Ne milling was performed using a Zeiss Orion NanoFab microscope in the Biomolecular Nanotechnology Center/QB3 at the University of California, Berkeley.Google Scholar