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Evaluation of High-Resolution STEM Imaging Advancement Under Gas-Environment with Open Window MEMS Holder and Gas Injection System

Published online by Cambridge University Press:  05 August 2019

Akinari Hanawa ,
Yudai Kubo ,
Hideki Kikuchi ,
Kuniyasu Nakamura ,
Manabu Shirai ,
Hiromi Inada ,
Hiroaki Matsumoto  and
Masahiro Kawasaki
Akinari Hanawa*
Affiliation:
Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan.
Yudai Kubo
Affiliation:
Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan.
Hideki Kikuchi
Affiliation:
Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan.
Kuniyasu Nakamura
Affiliation:
Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan.
Manabu Shirai
Affiliation:
Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan.
Hiromi Inada
Affiliation:
Science System Product Division, Hitachi High-Technologies Corporation, Hitachinaka, Ibaraki, Japan.
Hiroaki Matsumoto
Affiliation:
Hitachi High-Technologies Co., Ltd., Chao Yang District, Beijing, China.
Masahiro Kawasaki
Affiliation:
Hitachi High-Technologies America Inc., Clarksburg MD, USA.
*
*Corresponding author: akinari.hanawa.gv@hitachi-hightech.com

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 694 - 695
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Inada, H et al. , Microsc. Microanal. 24 (2018), p. 318.Google Scholar
[2]Inada, H et al. , Microsc. Microanal. 23 (2017), 918.Google Scholar