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Evaluation of Crystal Lattice Rotation around a Stress-Induced Twin in a Step-Graded SiGe / Si (110) Using STEM Moiré Observation and its Image Analysis

Published online by Cambridge University Press:  05 August 2019

Junji Yamanaka ,
Chiaya Yamamoto ,
Mai Shirakura ,
Kosuke O. Hara ,
Keisuke Arimoto ,
Kiyokazu Nakagawa ,
Akimitsu Ishizuka  and
Kazuo Ishizuka
Junji Yamanaka*
Affiliation:
Center for Instrumental Analysis, University of Yamanashi, 4-3-11 Takeda, Kofu, JAPAN
Chiaya Yamamoto
Affiliation:
Center for Instrumental Analysis, University of Yamanashi, 4-3-11 Takeda, Kofu, JAPAN
Mai Shirakura
Affiliation:
Center for Instrumental Analysis, University of Yamanashi, 4-3-11 Takeda, Kofu, JAPAN
Kosuke O. Hara
Affiliation:
Center for Cryst. Sci. & Tech., University of Yamanashi, Miyamaecho, Kofu, JAPAN
Keisuke Arimoto
Affiliation:
Center for Cryst. Sci. & Tech., University of Yamanashi, Miyamaecho, Kofu, JAPAN
Kiyokazu Nakagawa
Affiliation:
Center for Cryst. Sci. & Tech., University of Yamanashi, Miyamaecho, Kofu, JAPAN
Akimitsu Ishizuka
Affiliation:
HREM Research Inc., 14-48 Matsukazedai, Higashimastuyama, JAPAN
Kazuo Ishizuka
Affiliation:
HREM Research Inc., 14-48 Matsukazedai, Higashimastuyama, JAPAN
*
*Corresponding author: jyamanak@yamanashi.ac.jp

Abstract

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Type
Data Acquisition Schemes, Machine Learning Algorithms, and Open Source Software Development for Electron Microscopy
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 242 - 243
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Yamanaka, Junji et al. , Thin Solid Films 508 (2006), p. 103.Google Scholar
[2]Arimoto, Keisuke et al. , J. Cryst. Growth, 311 (2009), p. 819.Google Scholar
[3]Kondo, Y. and Endo, N., Kenbikyo 49 (2014), p. 226, in Japanese.Google Scholar
[4]Ishizuka, Akimitsu, Hytch, Martin and Kazuo Ishizuka, , Microscopy, 66 (2017), p. 217.Google Scholar
[5]Yamanaka, Junji et al. , J. Mat. Sci. & Chem. Eng., 5 (2017), p. 102.Google Scholar
[6]Yamanaka, Junji et al. , J. Mat. Sci. & Chem. Eng., 6 (2018), p. 8.Google Scholar