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Enhancing Materials and Device Analysis Capability in the SEM and FIB-SEM by using a Nanomanipulator

Published online by Cambridge University Press:  25 July 2016

Matthew Hiscock ,
Christian Lang ,
Peter Statham ,
Frank Bauer  and
Cheryl Hartfield
Matthew Hiscock
Affiliation:
Oxford Instruments Nanoanalysis, High Wycombe, United Kingdom
Christian Lang
Affiliation:
Oxford Instruments Nanoanalysis, High Wycombe, United Kingdom
Peter Statham
Affiliation:
Oxford Instruments Nanoanalysis, High Wycombe, United Kingdom
Frank Bauer
Affiliation:
Oxford Instruments Nanoanalysis, Wiesbaden, Germany
Cheryl Hartfield
Affiliation:
Oxford Instruments Nanoanalysis, Dallas, United States

Abstract

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Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 16 - 17
Copyright
© Microscopy Society of America 2016