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Enhancing Contrast of Al Traces on Si Substrates using Low-voltage SEM-hosted XRM

Published online by Cambridge University Press:  03 August 2008

BC Gundrum ,
JA Hunt  and
MA Zurbuchen
BC Gundrum
Affiliation:
Gatan Research & Development
JA Hunt
Affiliation:
Gatan Research & Development
MA Zurbuchen
Affiliation:
The Aerospace Corporation
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1118 - 1119
Copyright
© 2008 Microscopy Society of America

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