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Energy-dispersive x-ray spectrum simulation and emprical observation of 22nm node high-k metal gate structure

Published online by Cambridge University Press:  23 September 2015

Imen Rezadad ,
Brenda Prenitzer ,
Stephen Schwarz ,
Brian Kempshall  and
Robert Peale
Imen Rezadad
Affiliation:
Physics Department, University of Central Florida, Orlando, Florida, USA. NanoSpective, Inc., Orlando, Florida, USA.
Brenda Prenitzer
Affiliation:
NanoSpective, Inc., Orlando, Florida, USA.
Stephen Schwarz
Affiliation:
NanoSpective, Inc., Orlando, Florida, USA.
Brian Kempshall
Affiliation:
NanoSpective, Inc., Orlando, Florida, USA.
Robert Peale
Affiliation:
Physics Department, University of Central Florida, Orlando, Florida, USA.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1785 - 1786
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Williams, David B. "Transmission Electron Microscopy", (Springer, New York), P. 665.Google Scholar
[2] Drouin, D., et al., Scanning 29 (2007) 92–101.CrossRefGoogle ScholarPubMed
[3] <underline>http://montecarlomodeling.mcgill.ca</underline><underline>/</underline>.http://montecarlomodeling.mcgill.ca/.>Google Scholar