Hostname: page-component-76fb5796d-9pm4c Total loading time: 0 Render date: 2024-04-26T10:34:15.711Z Has data issue: false hasContentIssue false
  • English
  • Français

Energy Filtering of Schottky Field Emission Gun Using Fringe Field Monochromator

Published online by Cambridge University Press:  02 July 2020

H.W. Mook ,
A.H.V. van Veen  and
P. Kruit
H.W. Mook
Affiliation:
Delft University of Technology, Dept. of Applied Physics, Lorentzweg 1, 2628 CJ, Delft, The Netherlandsmook@cpo.tn.tudelft.nl
A.H.V. van Veen
Affiliation:
Delft University of Technology, Dept. of Applied Physics, Lorentzweg 1, 2628 CJ, Delft, The Netherlandsmook@cpo.tn.tudelft.nl
P. Kruit
Affiliation:
Delft University of Technology, Dept. of Applied Physics, Lorentzweg 1, 2628 CJ, Delft, The Netherlandsmook@cpo.tn.tudelft.nl
Get access

Extract

The energy resolution which can be attained in electron energy loss spectroscopy (EELS) is determined by the energy spread of the electron source. The energy width of a high brightness electron gun (typically 0.4 to 0.8 eV) blurs the energy spectrum. A pre-specimen energy filter or monochromator must be used to reduce the energy width of the beam below 0.1 eV to allow detailed EELS analysis of the electronic band structures in materials. The monochromator can not only improve EELS, but it is also capable of improving the spatial resolution in low voltage SEM, which is limited by the chromatic blur of the objective lens. A new type of monochromator the Fringe Field Monochromator has been designed and experiments in an ultra high vacuum setup show the monochromatisation of a Schottky Field Emission Gun.

Type
Compositional Imaging and Spectroscopy
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 646 - 647
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Batson, P.E., Journal of Microscopy, Vol.180 (1995) 204CrossRefGoogle Scholar
2.Mook, H.W. and Kruit, P., Optics and Design of the Fringe Field Monochromator for a Schottky Field Emission Gun, to be published in Nuclear Instruments and Methods A (1999)CrossRefGoogle Scholar
3.Fransen, M.J., J. Vac. Science & Techn. B 16(1998) 4549CrossRefGoogle Scholar