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Electron Probe Evaluation of Heterogeneity in the Certification of NIST Standard Reference Materials for Microanalysis

Published online by Cambridge University Press:  02 July 2020

R. B. Marinenko
Affiliation:
Surface and Microanalysis Science Division and Statistical Engineering Division, National Institute of Standards and Technology (NIST), Gaithersburg, MD, 20899
S. Leigh
Affiliation:
Statistical Engineering Division, National Institute of Standards and Technology (NIST), Gaithersburg, MD, 20899
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Extract

The certification process for a microanalysis standard can be quite lengthy. In addition to certifying the reference material for composition, the extent of heterogeneity between specimens and within specimens must be determined. NIST (or formerly, NBS) 260 Special Publications have been used in the past to describe procedures used for individual SRM certifications. Some of these publications describe in detail how the extent of microheterogeneity (or, microhomogeneity) as well as the specimen to specimen heterogeneity can be determined. The intent here is to describe a general statistical approach used at NIST to determine and report the extent of heterogeneity. This approach can be readily used by other laboratories either for certification or for evaluation of standards.

When evaluating a material for use as a standard, there are several physical characteristics which must be satisfied. The material must be robust under the electron beam at the voltages and currents to which it will be subjected in its proposed use. When mounted and polished, it should be stable on exposure to the atmosphere. However, if the material will not be mounted and polished in use, it should be in the same physical form as the final certified standard material.

Type
Quantitative Microanalysis
Copyright
Copyright © Microscopy Society of America

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References

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