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Electromigration of Copper in Lithographically-Defined Aluminum Nanowires

Published online by Cambridge University Press:  01 August 2018

Brian Zutter ,
Matthew Mecklenburg ,
Shaul Aloni  and
B. C. Regan
Brian Zutter
Affiliation:
Department of Physics and Astronomy & California NanoSystems Institute, University of California, Los Angeles, CA, USA
Matthew Mecklenburg
Affiliation:
Center for Electron Microscopy and Microanalysis, University of Southern California, Los Angeles, CA, USA
Shaul Aloni
Affiliation:
Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
B. C. Regan
Affiliation:
Department of Physics and Astronomy & California NanoSystems Institute, University of California, Los Angeles, CA, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 2190 - 2191
Copyright
© Microscopy Society of America 2018 

References

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[6] This work was supported by FAME, one of six centers of STARnet, a Semiconductor Research Corporation program sponsored by MARCO and DARPA, by National Science Foundation (NSF) award DMR-1611036, and by NSF STC award DMR-1548924. Data presented were acquired at the Center for Electron Microscopy and Microanalysis at the University of Southern California.Google Scholar