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Electromigration of Copper in Lithographically-Defined Aluminum Nanowires
Published online by Cambridge University Press: 01 August 2018
Abstract
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- Type
- Abstract
- Information
- Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 2190 - 2191
- Copyright
- © Microscopy Society of America 2018
References
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[6] This work was supported by FAME, one of six centers of STARnet, a Semiconductor Research Corporation program sponsored by MARCO and DARPA, by National Science Foundation (NSF) award DMR-1611036, and by NSF STC award DMR-1548924. Data presented were acquired at the Center for Electron Microscopy and Microanalysis at the University of Southern California.Google Scholar