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Electrical Isolation Preserved by Plasma Focused Ion Beam TEM Sample Preparation and Verified with STEM SEEBIC Imaging

Published online by Cambridge University Press:  30 July 2020

Matthew Mecklenburg ,
Fred Shaapur ,
William Hubbard ,
Brian Zutter  and
B. C. Regan
Matthew Mecklenburg
Affiliation:
University of Southern California, Los Angeles, California, United States
Fred Shaapur
Affiliation:
FabMetrix, Inc., Scottsdale, Arizona, United States
William Hubbard
Affiliation:
NanoElectroning Imaging, Inc. (NEI), Los Angeles, California, United States
Brian Zutter
Affiliation:
Department of Physics & Astronomy, University of California, Los Angeles, Los Angeles, California, United States
B. C. Regan
Affiliation:
Department of Physics & Astronomy, University of California, Los Angeles, Los Angeles, California, United States

Abstract

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Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 194 - 195
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Copyright
Copyright © Microscopy Society of America 2020

References

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Hubbard, W A et al. , Applied Physics Letters 115 (2019), p. 133502.10.1063/1.5117055CrossRefGoogle Scholar
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Mecklenburg, M et al. , Microscopy and Microanalysis 19 (S2) (2013 ), p. 458-459.10.1017/S1431927613004285CrossRefGoogle Scholar
Data presented here were acquired at the Core Center of Excellence in Nano Imaging (CNI) at the University of Southern California. This work was supported by NSF STC award DMR-1548924 (STROBE), by NSF award DMR-1611036, and by the UCLA PSEIF.Google Scholar