Effects of Water Vapour on Electron and Ion Beam Deposited Platinum

Richard M Langford; Dogan Ozkaya; J Sheridan; Richard Chater

doi:10.1017/S1431927604883417

Botman, A Mulders, J J L and Hagen, C W 2009. Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective. Nanotechnology, Vol. 20, Issue. 37, p. 372001.

Wnuk, Joshua D. Gorham, Justin M. Rosenberg, Samantha G. Madey, Theodore E. Hagen, Cornelis W. and Fairbrother, D. Howard 2010. Atomic radical abatement of organic impurities from electron beam deposited metallic structures. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 28, Issue. 3, p. 527.

Wiedemair, Justyna Menegazzo, Nicola Pikarsky, Joel Booksh, Karl S. Mizaikoff, Boris and Kranz, Christine 2010. Novel electrode materials based on ion beam induced deposition of platinum carbon composites. Electrochimica Acta, Vol. 55, Issue. 20, p. 5725.

Wnuk, J.D. Rosenberg, S.G. Gorham, J.M. van Dorp, W.F. Hagen, C.W. and Fairbrother, D.H. 2011. Electron beam deposition for nanofabrication: Insights from surface science. Surface Science, Vol. 605, Issue. 3-4, p. 257.

De Teresa, J. M. Córdoba, R. Fernández-Pacheco, A. Sangiao, S. and Ibarra, M. R. 2013. FIB Nanostructures. Vol. 20, Issue. , p. 95.

Roberts, Nicholas A. Fowlkes, Jason D. Magel, Gregory A. and Rack, Philip D. 2013. Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum. Nanoscale, Vol. 5, Issue. 1, p. 408.

Winkler, Robert Fowlkes, Jason Szkudlarek, Aleksandra Utke, Ivo Rack, Philip D. and Plank, Harald 2014. The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition. ACS Applied Materials & Interfaces, Vol. 6, Issue. 4, p. 2987.

Noh, J. H. Stanford, M. G. Lewis, B. B. Fowlkes, J. D. Plank, H. and Rack, P. D. 2014. Nanoscale electron beam-induced deposition and purification of ruthenium for extreme ultraviolet lithography mask repair. Applied Physics A, Vol. 117, Issue. 4, p. 1705.

Winkler, Robert Geier, Barbara and Plank, Harald 2014. Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds. Applied Physics A, Vol. 117, Issue. 4, p. 1675.

Plank, Harald Noh, Joo Hyon Fowlkes, Jason D. Lester, Kevin Lewis, Brett B. and Rack, Philip D. 2014. Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures. ACS Applied Materials & Interfaces, Vol. 6, Issue. 2, p. 1018.

Stanford, Michael G. Lewis, Brett B. Noh, Joo Hyon Fowlkes, Jason D. Roberts, Nicholas A. Plank, Harald and Rack, Philip D. 2014. Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reaction. ACS Applied Materials & Interfaces, Vol. 6, Issue. 23, p. 21256.

Geier, Barbara Gspan, Christian Winkler, Robert Schmied, Roland Fowlkes, Jason D. Fitzek, Harald Rauch, Sebastian Rattenberger, Johannes Rack, Philip D. and Plank, Harald 2014. Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H2O Reactions. The Journal of Physical Chemistry C, Vol. 118, Issue. 25, p. 14009.

Stanford, Michael G. Lewis, Brett B. Noh, Joo Hyon Fowlkes, Jason D. and Rack, Philip D. 2015. Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits. ACS Applied Materials & Interfaces, Vol. 7, Issue. 35, p. 19579.

Thorman, Rachel M Kumar T. P., Ragesh Fairbrother, D Howard and Ingólfsson, Oddur 2015. The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors. Beilstein Journal of Nanotechnology, Vol. 6, Issue. , p. 1904.

Schmied, Roland Fowlkes, Jason D Winkler, Robert Rack, Phillip D and Plank, Harald 2015. Fundamental edge broadening effects during focused electron beam induced nanosynthesis. Beilstein Journal of Nanotechnology, Vol. 6, Issue. , p. 462.

Winkler, Robert Schmidt, Franz-Philipp Haselmann, Ulrich Fowlkes, Jason D. Lewis, Brett B. Kothleitner, Gerald Rack, Philip D. and Plank, Harald 2017. Direct-Write 3D Nanoprinting of Plasmonic Structures. ACS Applied Materials & Interfaces, Vol. 9, Issue. 9, p. 8233.

Plank, Harald Winkler, Robert Schwalb, Christian H. Hütner, Johanna Fowlkes, Jason D. Rack, Philip D. Utke, Ivo and Huth, Michael 2019. Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review. Micromachines, Vol. 11, Issue. 1, p. 48.

Barth, Sven Huth, Michael and Jungwirth, Felix 2020. Precursors for direct-write nanofabrication with electrons. Journal of Materials Chemistry C, Vol. 8, Issue. 45, p. 15884.

Utke, I. Swiderek, P. Höflich, K. Madajska, K. Jurczyk, J. Martinović, P. and Szymańska, I.B. 2022. Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical vapour deposition, atomic layer deposition, and fundamental surface and gas phase studies. Coordination Chemistry Reviews, Vol. 458, Issue. , p. 213851.

Salvador-Porroche, Alba Herrer, Lucía Sangiao, Soraya de Teresa, José María and Cea, Pilar 2022. Low-resistivity Pd nanopatterns created by a direct electron beam irradiation process free of post-treatment steps. Nanotechnology, Vol. 33, Issue. 40, p. 405302.

Article contents

Effects of Water Vapour on Electron and Ion Beam Deposited Platinum

Extract

Access options

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Article contents

Effects of Water Vapour on Electron and Ion Beam Deposited Platinum

Extract

Access options

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests