Hostname: page-component-8448b6f56d-sxzjt Total loading time: 0 Render date: 2024-04-24T01:41:50.717Z Has data issue: false hasContentIssue false
  • English
  • Français

EDX Analysis of Low Concentration Dopant using HD-2700 Aberration Corrected STEM Equipped with Dual SDD

Published online by Cambridge University Press:  23 September 2015

Takahiro Sato ,
Yuya Suzuki ,
Hiroaki Matsumoto ,
Takahito Hashimoto ,
Kuniyasu Nakamura ,
Taiga Miura  and
Hisaharu Yoshida
Takahiro Sato
Affiliation:
.Science Systems Design Div., Hitachi High-Technologies Corporation, 1040 Ichige, Hitachinaka, Ibaraki 312-0033, Japan
Yuya Suzuki
Affiliation:
.Science Systems Design Div., Hitachi High-Technologies Corporation, 1040 Ichige, Hitachinaka, Ibaraki 312-0033, Japan
Hiroaki Matsumoto
Affiliation:
.Science Systems Design Div., Hitachi High-Technologies Corporation, 1040 Ichige, Hitachinaka, Ibaraki 312-0033, Japan
Takahito Hashimoto
Affiliation:
.Science Systems Design Div., Hitachi High-Technologies Corporation, 1040 Ichige, Hitachinaka, Ibaraki 312-0033, Japan
Kuniyasu Nakamura
Affiliation:
.Science Systems Design Div., Hitachi High-Technologies Corporation, 1040 Ichige, Hitachinaka, Ibaraki 312-0033, Japan
Taiga Miura
Affiliation:
.Vacuum Device Inc., 1285-5 Iijima-cho, Mito, Ibaraki 311-4155, Japan
Hisaharu Yoshida
Affiliation:
.Vacuum Device Inc., 1285-5 Iijima-cho, Mito, Ibaraki 311-4155, Japan

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2013 - 2014
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Hashimoto, T., et al., Microsc. Microanal. 20, 2014, p. 604–605.Google Scholar
[2] Asayama, K., et al., Applied Physics Express 1 (2008) 074001.Google Scholar
[3] Ohnishi, T., et al., Proc. 25th International Symposium for Testing and Failure Analysis, 1999, pp. 449–453.Google Scholar