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EBSD Strain Analysis of Epitaxial Si1-x Gex on Si

Published online by Cambridge University Press:  08 April 2017

M Vaudin ,
G Stan ,
F DelRio ,
L Friedman  and
R Cook
M Vaudin
Affiliation:
National Institute of Standards and Technology
G Stan
Affiliation:
National Institute of Standards and Technology
F DelRio
Affiliation:
National Institute of Standards and Technology
L Friedman
Affiliation:
National Institute of Standards and Technology
R Cook
Affiliation:
National Institute of Standards and Technology

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 422 - 423
Copyright
Copyright © Microscopy Society of America 2011