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The Dual Challenges for FIBXTEM in the Era of sub-50nm Feature Sizes

Published online by Cambridge University Press:  26 July 2009

B Tracy ,
J Gray ,
E Adem ,
B Phillips ,
A delRosario ,
A Myers ,
M Sidorov  and
M Guillena
B Tracy
Affiliation:
Spansion
J Gray
Affiliation:
Spansion
E Adem
Affiliation:
Spansion
B Phillips
Affiliation:
Spansion
A delRosario
Affiliation:
Spansion
A Myers
Affiliation:
Spansion
M Sidorov
Affiliation:
Spansion
M Guillena
Affiliation:
Spansion

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 314 - 315
Copyright
Copyright © Microscopy Society of America 2009