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The Development of Ultra-high Vacuum Cs-Corrected Scanning Transmission Electron Microscope for Fast Fabrication of Desired Nanostructures

Published online by Cambridge University Press:  31 July 2006

K Furuya ,
K Mitsuishi ,
M Tanaka ,
M Takeguchi ,
Y Kondo ,
F Hosokawa ,
K Okamoto ,
T Sannomiya ,
M Hori  and
T Iwama
...Show all authors
K Furuya
Affiliation:
National Institute for Materials Science,Japan
K Mitsuishi
Affiliation:
National Institute for Materials Science,Japan
M Tanaka
Affiliation:
National Institute for Materials Science,Japan
M Takeguchi
Affiliation:
National Institute for Materials Science,Japan
Y Kondo
Affiliation:
JEOL Ltd,Japan
F Hosokawa
Affiliation:
JEOL Ltd,Japan
K Okamoto
Affiliation:
JEOL Ltd,Japan
T Sannomiya
Affiliation:
JEOL Ltd,Japan
M Hori
Affiliation:
JEOL Ltd,Japan
T Iwama
Affiliation:
JEOL Ltd,Japan
M Kawazoe
Affiliation:
JEOL Ltd,Japan

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1366 - 1367
Copyright
© 2006 Microscopy Society of America