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Development of STEM Imaging in SEM Using Photon Detector

Published online by Cambridge University Press:  05 August 2019

Kotaro Hosoya ,
Yukari Dan  and
Atsushi Muto
Kotaro Hosoya*
Affiliation:
Nanotechnology System Division, Hitachi High Technologies America, Inc., Clarksburg, USA.
Yukari Dan
Affiliation:
EM Department, Hitachi High Technologies Europe GmbH, Warrington, UK.
Atsushi Muto
Affiliation:
Nanotechnology System Division, Hitachi High Technologies America, Inc., Clarksburg, USA.
*
*Corresponding author: kotaro.hosoya@hitachi-hta.com

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 552 - 553
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Orai, Y et al. , J. Phys.: Conf. Ser (2014) p.522.Google Scholar
[2]Goldstein, Joseph et al. , in “Scanning Electron Microscopy and X-ray Microanalysis”, (2003) p.203.Google Scholar
[3]Nishimura, M et al. , Hitachi S.I.NEWS 56 (1) (2013), p.37.Google Scholar