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Development of New Diffraction Microscope Based on Conventional Scanning Electron Microscope

Published online by Cambridge University Press:  03 August 2008

O Kamimura ,
T Dobashi ,
K Kawahara ,
T Abe  and
K Gohara
O Kamimura
Affiliation:
Hitachi Ltd
T Dobashi
Affiliation:
Hitachi Ltd
K Kawahara
Affiliation:
Hokkaido University, Japan
T Abe
Affiliation:
Hokkaido University, Japan
K Gohara
Affiliation:
Hokkaido University, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 826 - 827
Copyright
© 2008 Microscopy Society of America

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