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Development of Line Analysis and Real-Time Elemental Mapping System in Stem Equipped with a Two-Window Energy Filter

Published online by Cambridge University Press:  02 July 2020

K. Kaji ,
T. Aoyama ,
S. Taya  and
S. Isakozawa
K. Kaji
Affiliation:
Hitachi Research Laboratory, Hitachi Ltd., Hitachi Ibaraki, 319-1292, Japan
T. Aoyama
Affiliation:
Hitachi Research Laboratory, Hitachi Ltd., Hitachi Ibaraki, 319-1292, Japan
S. Taya
Affiliation:
Instruments Group, Hitachi Ltd., Hitachinaka, Ibaraki , 312-8504, Japan
S. Isakozawa
Affiliation:
Instruments Group, Hitachi Ltd., Hitachinaka, Ibaraki , 312-8504, Japan
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Abstract

The ability to obtain elemental maps processed by using inelastically scattered electrons in a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) is extremely useful in the analysis of materials, and semiconductor devices such as ULSI’s and GMR heads. Electron energy loss spectra (EELS) also give useful information not only to identify unknown materials but also to study chemical bonding states of the objective atoms. Hitachi developed an elemental mapping system, consisting of a STEM (Hitachi, HD- 2000) equipped with a two-window energy filter (Hitachi, ELV-2000), and performed realtime conventional jump-ratio images with nanometer resolution by in-situ calculation of energy-filtered signals [1]. Additional function of acquiring EELS along any lines on specimen has been developed in this system to investigate the energy loss near edge structure (ELNES).

Figure 1 shows a schematic figure of the two-window energy filter, consisting of two quadrupole lenses for focusing and zooming spectra, respectively, a magnetic prism spectrometer, a deflection coil and two kinds of electron beam detectors.

Type
EELS Microanalysis At High Sensitivity: Advances in Spectrum Imaging, Energy Filtering and Detection (Organized by R. Leapman and J. Bruley)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1134 - 1135
Copyright
Copyright © Microscopy Society of America 2001

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References

references

1.Kaji, K.et al., Proc. Ann M&M Meeting 6 (2000) 179.Google Scholar