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Development of Automatic Magnification Calibration Function for Scanning Transmission Electron Microscope

Published online by Cambridge University Press:  01 August 2005

H Inada ,
D Terauchi ,
M Ozawa ,
R Tsuneta ,
H Tanaka ,
M Konno ,
S I Watanabe ,
S Aizawa ,
K Nakamura  and
A Takane
H Inada
Affiliation:
Hitachi High Technologies, Japan
D Terauchi
Affiliation:
Hitachi High Technologies, Japan
M Ozawa
Affiliation:
Hitachi Science Systems, Japan
R Tsuneta
Affiliation:
Central Research Laboratory, Japan
H Tanaka
Affiliation:
Hitachi High Technologies, Japan
M Konno
Affiliation:
Hitachi Science Systems, Japan
S I Watanabe
Affiliation:
Hitachi High Technologies, Japan
S Aizawa
Affiliation:
Hitachi High Technologies, Japan
K Nakamura
Affiliation:
Central Research Laboratory, Japan
A Takane
Affiliation:
Hitachi High Technologies, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 752 - 753
Copyright
© 2005 Microscopy Society of America