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Development of Automated Micro-Sampling System and Application to Semiconductor Devices

Published online by Cambridge University Press:  01 August 2018

Takahiro Sato ,
Yuka Aizawa ,
Masato Suzuki ,
Satoshi Tomimatsu  and
Junich Katane
Takahiro Sato
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Yuka Aizawa
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan
Masato Suzuki
Affiliation:
Hitachi High-Tech Science corp., Beam Technology Systems Design Group 1, Oyama-cho, Japan
Satoshi Tomimatsu
Affiliation:
Hitachi High-Tech Science corp., Beam Technology Systems Design Group 1, Oyama-cho, Japan
Junich Katane
Affiliation:
Hitachi High-Technologies corp., Science System Product Div., Hitachinaka-shi, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 834 - 835
Copyright
© Microscopy Society of America 2018 

References

[1] Ohnishi, T., Koike, H., et al., Proc. 25th Int. Symp. Testing and Failure Analysis 1999) p. 499.Google Scholar
[2] Tomimatsu, S., Sato, M., Asahata, T. Suzuki, H. Abstract of NANOTS2014, p.99.Google Scholar
[3] Triplebeam” is a registered trademark of Hitachi High-Tech Science Corporation in the United States and Japan.Google Scholar