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Development of a 1MV-Field-Emission Electron Microscope II. Performance

Published online by Cambridge University Press:  02 July 2020

T. Kawasaki ,
T. Yoshida ,
M. Gorai ,
T. Akashi ,
I. Matsui ,
T. Furutsu ,
O. Kamimura ,
T. Matsuda ,
N. Osakabe  and
A. Tonomura
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T. Kawasaki
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
T. Yoshida
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
M. Gorai
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan
T. Akashi
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan
I. Matsui
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan CREST, Japan Science and Technology Corporation (JST)
T. Furutsu
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan CREST, Japan Science and Technology Corporation (JST)
O. Kamimura
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan
T. Matsuda
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
N. Osakabe
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
A. Tonomura
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
K. Kitazawa
Affiliation:
Department of Applied Chemistry, University of Tokyo, Tokyo, 113-8656, Japan CREST, Japan Science and Technology Corporation (JST)
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Extract

The development of increasingly coherent and penetrating electron beams in electron microscopy will hasten progress in such fields as high resolution imaging, electron holography, and material structure investigation. Now that we have completed the development of the 1MV-FE- TEM (H-1000FT), we report its performance from the viewpoint of coherent illumination.

We observed thin films of gold in testing the high-resolution performance of H-1000FT.Crystal lattice fringes are formed from the interference between Bragg diffracted electron waves. In TEM observation of the films, the visibility of the fringes depends on the coherence of the electron wave and the overall stability of the microscope. Here, we calculated chromatic aberration-limited resolution d, given by ∼-(Δ ƛ)1/2, to be ∼ 0.6 Å (Δ:focus spread). We then slightly tilted the illumination to partially escape from the chromatic effect and to enable us to a shorter spacing lattice image. Figure 1 shows a lattice fringe image we obtained for a Au thin film, in which lattice fringes of 0.498 Å are clearly visible.

Type
Instrument Performance
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 1140 - 1141
Copyright
Copyright © Microscopy Society of America

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References

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