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Determination of the Spatial Resolution Function in Energy Filtered TEM and Application to Thin Gate Oxide Measurements at 80 eV Energy Loss

Published online by Cambridge University Press:  01 August 2004

S. Jullian ,
R. Pantel ,
M. Juhel ,
L.F.T Kwakman  and
G. Vincent
S. Jullian
Affiliation:
Philips Semiconductor Crolles, Crolles, France
R. Pantel
Affiliation:
STMicroelectronics, Crolles, France
M. Juhel
Affiliation:
STMicroelectronics, Crolles, France
L.F.T Kwakman
Affiliation:
Philips Semiconductor Crolles, Crolles, France
G. Vincent
Affiliation:
Universite Joseph Fourier, Grenoble, France
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 578 - 579
Copyright
© 2004 Microscopy Society of America

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