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Determination of k-Factors Using the Extrapolation Technique

Published online by Cambridge University Press:  31 July 2006

Q Jin  and
S Wang
Q Jin
Affiliation:
Micron Technology,Inc
S Wang
Affiliation:
Micron Technology,Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 874 - 875
Copyright
© 2006 Microscopy Society of America