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Detector Solid Angle Formulas for Use in X-Ray Energy Dispersive Spectrometry

Published online by Cambridge University Press:  16 March 2009

Nestor J. Zaluzec
Nestor J. Zaluzec*
Affiliation:
Argonne National Laboratory, Electron Microscopy Center, Materials Science Division Bldg. 212, 9700 S. Cass Ave., Argonne, IL 60439
*
E-mail: Zaluzec@aaem.amc.anl.gov
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Abstract

With the advent of silicon drift X-ray detectors, a range of new geometries has become possible in electron optical columns. Because of their compact size, these detectors can potentially achieve high geometrical collection efficiencies; however, using traditional approximations detector solid angle calculations rapidly break down and at times can yield nonphysical values. In this article we present generalized formulas that can be used to calculate the variation in detection solid angle for contemporary Si(Li) as well as new silicon drift configurations.

Keywords

solid angleSDDSi(Li)X-ray detectorsEDSXEDScollection efficiency
Type
Microanalysis
Information
Microscopy and Microanalysis , Volume 15 , Issue 2 , April 2009 , pp. 93 - 98
Copyright
Copyright © Microscopy Society of America 2009

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References

REFERENCES

Barken, S., Saveliev, V.D., Iwanczyk, J.S., Feng, L., Tull, C.R., Patt, B.E., Newbury, D.E., Small, J.A. & Zaluzec, N.J. (2004). A new improved silicon multi-cathode detector (SMCD) for microanalysis and X-ray mapping applications, Microsc Today 12, 36–38.CrossRefGoogle Scholar
Bertuccio, G., Castoldi, A., Longoni, A., Sampietro, M. & Gauthier, C. (1992). New electrode geometry and potential distribution for soft-X-ray drift detectors. Nucl Instrum Meth Phys Res A 312, 613–616.CrossRefGoogle Scholar
Fitzgerald, R., Keil, K. & Heinrich, K.F.J. (1968). Solid-state energy-dispersion spectrometer for electron-microprobe X-ray analysis. Science 159, 528.CrossRefGoogle ScholarPubMed
Gatti, E. & Rehak, P. (1984). Semiconductor drift chamber—An application of a novel charge transport scheme. Nucl Instrum Meth Phys Res 225, 608–614.CrossRefGoogle Scholar
Goldstein, J.I., Newbury, D.E., Echilin, P., Joy, D.C., Romig, A.D., Lyman, C.E., Fiori, C. & Lifshin, E. (1992). Scanning Electron Microscopy and X-ray Microanalysis. New York: Plenum.CrossRefGoogle Scholar
Iwanczyk, J.S.., Patt, B.E. & Segal, J. (1996). Simulation and modelling of a new silicon X-ray drift detector design for synchrotron radiation applications. Nucl Instrum Meth Phys Res A 380, 288–294.CrossRefGoogle Scholar
Kotula, P.G., Michael, J.R. & Rohde, M. (2008). Results from two four-channel Si-drift detectors on an SEM: Conventional and annular geometries. Microsc Microanal 14(Suppl. 2), 116–117.CrossRefGoogle Scholar
Zaluzec, N.J. (1979). Quantitative X-ray microanalysis. In Introduction to Analytical Electron Microscopy, Hren, J.J., Joy, D.C. & Goldstein, J.I. (Eds.), pp. 121–167. New York: Plenum Press.CrossRefGoogle Scholar
Zaluzec, N.J. (2004). XEDS systems for the next generation analytical electron microscope. Microsc Microanal 10(Suppl. 2), 122–123.CrossRefGoogle Scholar