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DELTA - A Novel Ultra-Low Voltage SEM for Electron Spectroscopic Imaging

  • Rasmus R. Schroder (a1) (a2), Bernd Schindler (a3), Michael Schnell (a3), Christian Hendrich (a3), Jakob Wensorra (a3), Wen-Shan Zhang (a1), Jorg Eisele (a2), Lisa Veith (a1), Jochen Kammerer (a2), Martin Pfannmoller (a2), Dirk Preikszas (a3) and Irene Wacker (a2)...
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Abstract

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References

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[1] Kaiser, U, et al, Ultramicroscopy 111 2011) p. 1239.
[2] Majorovits, E, et al, Biophysical J 110 2016) p. 776.
[3] Steigerwald, M, et al Frontiers of Characterization and Metrology for Nanoelectronics (2013).
[4] Cazaux, J Ultramicroscopy 110 2011) p. 242.
[5] cf. J Eisele et al, Microscopy and Microanalysis Conference Proceedings of this conference.
[6] cf. J Kammerer et al., Microscopy and Microanalysis Conference Proceedings of this conference.
[7] The authors acknowledge funding of the DELTA project by the German Federal Ministry of Education and Research to RRS (FKZ: 13GW0044).
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Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
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