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DELTA - A Novel Ultra-Low Voltage SEM for Electron Spectroscopic Imaging

Published online by Cambridge University Press:  01 August 2018

Rasmus R. Schroder ,
Bernd Schindler ,
Michael Schnell ,
Christian Hendrich ,
Jakob Wensorra ,
Wen-Shan Zhang ,
Jorg Eisele ,
Lisa Veith ,
Jochen Kammerer  and
Martin Pfannmoller
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Rasmus R. Schroder
Affiliation:
Cryo Electron Microscopy, BioQuant, Universitatsklinikum Heidelberg, Heidelberg, Germany. Centre for Advanced Materials (CAM), Universitat Heidelberg, Heidelberg, Germany.
Bernd Schindler
Affiliation:
Carl Zeiss Microscopy, Oberkochen, Germany.
Michael Schnell
Affiliation:
Carl Zeiss Microscopy, Oberkochen, Germany.
Christian Hendrich
Affiliation:
Carl Zeiss Microscopy, Oberkochen, Germany.
Jakob Wensorra
Affiliation:
Carl Zeiss Microscopy, Oberkochen, Germany.
Wen-Shan Zhang
Affiliation:
Cryo Electron Microscopy, BioQuant, Universitatsklinikum Heidelberg, Heidelberg, Germany.
Jorg Eisele
Affiliation:
Centre for Advanced Materials (CAM), Universitat Heidelberg, Heidelberg, Germany.
Lisa Veith
Affiliation:
Cryo Electron Microscopy, BioQuant, Universitatsklinikum Heidelberg, Heidelberg, Germany.
Jochen Kammerer
Affiliation:
Centre for Advanced Materials (CAM), Universitat Heidelberg, Heidelberg, Germany.
Martin Pfannmoller
Affiliation:
Centre for Advanced Materials (CAM), Universitat Heidelberg, Heidelberg, Germany.
Dirk Preikszas
Affiliation:
Carl Zeiss Microscopy, Oberkochen, Germany.
Irene Wacker
Affiliation:
Centre for Advanced Materials (CAM), Universitat Heidelberg, Heidelberg, Germany.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 626 - 627
Copyright
© Microscopy Society of America 2018 

References

[1] Kaiser, U, et al, Ultramicroscopy 111 2011) p. 1239.Google Scholar
[2] Majorovits, E, et al, Biophysical J 110 2016) p. 776.Google Scholar
[3] Steigerwald, M, et al Frontiers of Characterization and Metrology for Nanoelectronics (2013).Google Scholar
[4] Cazaux, J Ultramicroscopy 110 2011) p. 242.Google Scholar
[5] cf. J Eisele et al, Microscopy and Microanalysis Conference Proceedings of this conference.Google Scholar
[6] cf. J Kammerer et al., Microscopy and Microanalysis Conference Proceedings of this conference.Google Scholar
[7] The authors acknowledge funding of the DELTA project by the German Federal Ministry of Education and Research to RRS (FKZ: 13GW0044).Google Scholar