Skip to main content Accessibility help
×
Home

The Dark Side of EDX Tomography: Modeling Detector Shadowing to Aid 3D Elemental Signal Analysis

  • Catriona S.M. Yeoh (a1), David Rossouw (a1), Zineb Saghi (a1), Pierre Burdet (a1), Rowan K. Leary (a1) and Paul A. Midgley (a1)...

Abstract

A simple model is proposed to account for the loss of collected X-ray signal by the shadowing of X-ray detectors in the scanning transmission electron microscope. The model is intended to aid the analysis of three-dimensional elemental data sets acquired using energy-dispersive X-ray tomography methods where shadow-free specimen holders are unsuitable or unavailable. The model also provides a useful measure of the detection system geometry.

Copyright

Corresponding author

* Corresponding author. csmy2@cam.ac.uk

References

Hide All
Genc, A., Kovarik, L., Gu, M., Cheng, H., Plachinda, P., Pullan, L., Freitag, B. & Wang, C. (2013). XEDS STEM tomography for 3D chemical characterization of nanoscale particles. Ultramicroscopy 131, 2432.
Goldstein, J.I. (1979). Principles of thin film X-ray microanalysis. In Introduction to Analytical Electron Microscopy, Hren J.J., Goldstein, J.I. & Joy D.C. (Eds.), pp. 83120. New York, NY and London: Springer.
Goris, B., Polavarapu, L., Bals, S., Van Tendeloo, G. & Liz-Marzán, L.M. (2014). Monitoring galvanic replacement through three-dimensional morphological and chemical mapping. Nano Lett 14, 32203226.
Hawkes, P.W. (2006). The electron microscope as a structure projector. In Electron Tomography SE – 4, Frank, J. (Ed.), pp. 83111. New York, NY: Springer.
Leary, R., Midgley, P.A. & Thomas, J.M. (2012). Recent advances in the application of electron tomography to materials chemistry. Acc Chem Res 45, 17821791.
Lepinay, K., Lorut, F., Pantel, R. & Epicier, T. (2013). Chemical 3D tomography of 28nm high K metal gate transistor: STEM XEDS experimental method and results. Micron 47, 4349.
Midgley, P.A. & Dunin-Borkowski, R.E. (2009). Electron tomography and holography in materials science. Nat Mater 8, 271280.
Midgley, P.A. & Weyland, M. (2003). 3D electron microscopy in the physical sciences: The development of Z-contrast and EFTEM tomography. Ultramicroscopy 96, 413431.
Möbus, G., Doole, R.C. & Inkson, B.J. (2003). Spectroscopic electron tomography. Ultramicroscopy 96, 433451.
Newbury, D.E. (2005). X-ray spectrometry and spectrum image mapping at output count rates above 100 kHz with a silicon drift detector on a scanning electron microscope. Scanning 27, 227239.
Pantel, R. (2011). Coherent bremsstrahlung effect observed during STEM analysis of dopant distribution in silicon devices using large area silicon drift EDX detectors and high brightness electron source. Ultramicroscopy 111, 16071618.
Reed, S.J.B. (1975). Electron Microprobe Analysis. Cambridge: Cambridge University Press.
Saghi, Z., Xu, X., Peng, Y., Inkson, B. & Möbus, G. (2007). Three-dimensional chemical analysis of tungsten probes by energy dispersive X-ray nanotomography. Appl Phys Lett 91, 251906.
Schlossmacher, P. (2010). Nanoscale chemical compositional analysis with an innovative S/TEM-EDX system. Microsc Anal 24, S5S8.
Slater, T.J.A., Camargo, P.H.C., Burke, M.G., Zaluzec, N.J. & Haigh, S.J. (2014 a). Understanding the limitations of the Super-X energy dispersive X-ray spectrometer as a function of specimen tilt angle for tomographic data acquisition in the S/TEM. J Phys 522, 012025.
Slater, T.J.A., Macedo, A., Schroeder, S.L.M., Burke, M.G., O’Brien, P., Camargo, P.H.C. & Haigh, S.J. (2014 b). Correlating catalytic activity of Ag–Au nanoparticles with 3D compositional variations. Nano Lett 14(4), 19211926.
Tixier, R. & Philibert, J. (1969). Analyse quantitative d'échantillons minces. In Proceedings of the 5th International Congress on X-Ray Optics and Microanalysis, Mollenstedt, G. & Gaukler, K.H. (Eds.), pp. 180. Berlin: Springer-Verlag.
von Harrach, H.S., Dona, P., Freitag, B., Soltau, H., Niculae, A. & Rohde, M. (2010). An integrated multiple silicon drift detector system for transmission electron microscopes. J Phys 241, 012015.
Watanabe, M. (2011). X-ray energy-dispersive spectrometry in scanning transmission electron microscopes. In Scanning Transmission Electron Microscopy: Imaging and Analysis, Pennycook, S.J., Nellist, P.D. & Peter D. (Eds.), pp. 291352. New York, NY: Springer Science+Business Media.
Williams, D.B. & Carter, C.B. (2009). Transmission Electron Microscopy: A Textbook for Materials Science, 2nd ed. New York, NY: Springer.
Zaluzec, N.J. (2014). Analytical formulae for calculation of X-ray detector solid angles in the scanning and scanning/transmission analytical electron microscope. Microsc Microanal 20(1), 19.

Keywords

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed