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The Dark Side of EDX Tomography: Modeling Detector Shadowing to Aid 3D Elemental Signal Analysis

  • Catriona S.M. Yeoh (a1), David Rossouw (a1), Zineb Saghi (a1), Pierre Burdet (a1), Rowan K. Leary (a1) and Paul A. Midgley (a1)...


A simple model is proposed to account for the loss of collected X-ray signal by the shadowing of X-ray detectors in the scanning transmission electron microscope. The model is intended to aid the analysis of three-dimensional elemental data sets acquired using energy-dispersive X-ray tomography methods where shadow-free specimen holders are unsuitable or unavailable. The model also provides a useful measure of the detection system geometry.


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