Hostname: page-component-8448b6f56d-sxzjt Total loading time: 0 Render date: 2024-04-19T21:13:47.922Z Has data issue: false hasContentIssue false
  • English
  • Français

Custom Scan Control and Time Resolved Signal Acquisition for High Resolution SEM Imaging

Published online by Cambridge University Press:  01 August 2018

William C. Lenthe ,
Jean-Charles Stinville ,
McLean P. Echlin ,
Zhe Chen ,
Samantha Daly ,
Tresa M. Pollock  and
Marc De Graef
William C. Lenthe
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Jean-Charles Stinville
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
McLean P. Echlin
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
Zhe Chen
Affiliation:
Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Samantha Daly
Affiliation:
Dept. of Mechanical Engr., University of California at Santa Barbara, Santa Barbara, USA
Tresa M. Pollock
Affiliation:
Dept. of Materials, University of California at Santa Barbara, Santa Barbara, CA, USA
Marc De Graef
Affiliation:
Dept. of Materials Science and Engineering, Carnegie Mellon Univ., Pittsburgh, PA, USA

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 536 - 537
Copyright
© Microscopy Society of America 2018 

References

[1] Nolze, G Ultramicroscopy 107 2007) p. 172–183.Google Scholar
[2] Sutton, MA, et al, Meas. Sci. Technol. 17 2006) p. 2613.Google Scholar
[3] Carter, JL, et al, Mater. Sci. Eng., A 605 2014) p. 127–136.Google Scholar
[4] Woehl, TJ, et al, Ultramicroscopy 127 2013) p. 53–63.Google Scholar
[5] Sutton, MA, et al, Exp. Mech. 47 2007) p. 775–787.Google Scholar
[6] Sutton, MA, et al, Exp. Mech. 47 2007) p. 789–804.Google Scholar
[7] Kammers, AD Daly, S Exp. Mech. 53 2013) p. 1333–1341.Google Scholar
[8] Guizar-Sicairos, M, Thurman, ST Fienup, JR Opt. Lett. 33(2 2008) pp. 156–158.Google Scholar
[9] The authors acknowledge ONR Vannevar Bush Faculty Fellowship support (N00014-16-1-2821) as well as ONR grant N00014-16-1-2982 and an AFRL/AFOSR Center of Excellence Grant (FA9550-12- 1-0445). This work was supported by the U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under Award #DESC0008637 as part of the Center for PRedictive Integrated Structural Materials Science (PRISMS) at the University of Michigan.Google Scholar